[D-8-3L] Characterization of Hafnium Diffusion into Thermally-Grown SiO2 on Si(100)

Masanori Yamaoka, Akio Ohta, Seiichi Miyazaki (1.Graduate School of Advanced Sciences of Matter, Hiroshima University)

https://doi.org/10.7567/SSDM.2003.D-8-3L