The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[D-9-3] Pulsed-source MOCVD HfO2 ultrathin film growth optimized by in situ ellipsometry monitoring

Yoshishige Tsuchiya, Masato Endoh, Shunri Oda (1.Tokyo Institute of Technology, Research Center for Quantum Effect Electronics)

https://doi.org/10.7567/SSDM.2003.D-9-3