Generation of Radiation Pressure in Thermally Induced Ultrasonic Emitter Based on Nanocrystalline Silicon

Jun Hirota; Hiroyuki Shinoda; Nobuyoshi Koshida

doi:https://doi.org/10.7567/SSDM.2003.E-2-6

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[E-2-6] Generation of Radiation Pressure in Thermally Induced Ultrasonic Emitter Based on Nanocrystalline Silicon

Jun Hirota, Hiroyuki Shinoda, Nobuyoshi Koshida (1.Department of Electronical and Electronic Engineering, Faculty of Technology, Tokyo University of Agriculture and Technology, 2.The University of Tokyo)

https://doi.org/10.7567/SSDM.2003.E-2-6

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