[E-7-2] Piezoresistive Nanomechanical Cantilever based on InAs/AlGaSb Heterostructure

Lionel F. Houlet、Hiroshi Yamaguchi、Sen Miyashita、Yoshiro Hirayama (1.NTT Basic Research Laboratories.、2.NTT-AT.、3.CREST-JST.)

https://doi.org/10.7567/SSDM.2003.E-7-2