[E-7-2] Piezoresistive Nanomechanical Cantilever based on InAs/AlGaSb Heterostructure

Lionel F. Houlet, Hiroshi Yamaguchi, Sen Miyashita, Yoshiro Hirayama (1.NTT Basic Research Laboratories., 2.NTT-AT., 3.CREST-JST.)

https://doi.org/10.7567/SSDM.2003.E-7-2