[E-8-3] Fabrication of Two-Dimensional Carbon Nanostructures Using Radio-Frequency Plasma-Enhanced Chemical Vapor Deposition

Mineo Hiramatsu, Kenichi Shiji, Hiroshi Amano, Yoshinori Ando, Masaru Hori (1.Department of Electrical and Electronic Engineering, Meijo University, 2.Department of Materials Science and Engineering, Meijo University, 3.Department of Quantum Engineering, Nagoya University)

https://doi.org/10.7567/SSDM.2003.E-8-3