[F-6-1] Development of an integrated a-Si:H photodiode detector and its evaluation for chemical and biochemical microfluidic analysis

T. Kamei、B. M. Paegel、E. T. Lagally、A. M. Skelley、J. R. Scherer、R. A. Street、R. A. Mathies (1.Department of Chemistry, University of California at Berkeley、2.Palo Alto Research Center、3.On leave from National Institute of Advanced Industrial Science and Technology (AIST))

https://doi.org/10.7567/SSDM.2003.F-6-1