The Japan Society of Applied Physics

[G-8-1] High-Performance, Low-Cost SiGe:C BiCMOS Technology

B. Tillack, D. Knoll, B. Heinemann, K.-E. Ehwald, H. Rucker, R. Barth, J. Bauer, K. Blum, D. Bolze, J. Borngraber, J. Drews, G. Fischer, A. Fox, F. Fuernhammer, O. Fursenko, T. Grabolla, U. Haak, W. Hoppner, K. Kopke, D. Kruger, B. Kuck, R. Kurps, M. Marschmeyer, H. H. Richter, D. Schmidt, P. Schley, R. Scholz, W. Winkler, D. Wolansky, H.-E. Wulf, Y. Yamamoto, P. Zaumseil (1.IHP)

https://doi.org/10.7567/SSDM.2003.G-8-1