The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P11-3] Two-Step Electrode Self-Aligned Process of InP-based RTDs for Highly Integrated RTD/HEMT Circuits

Toshihiro Ohki, Naoya Okamoto, Tsuyoshi Takahashi, Kozo Makiyama, Kenji Imanishi, Naoki Hara (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2003.P11-3