[P13-4] High Resolution Periodical Structure Fabricated by Laser Machining in Photosensitive Polymers

Shinya Shibata, Yanlong Che, Okihiro Sugihara, Naomichi Okamoto, Toshikuni Kaino (1.Graduate School of Electronic Science and Technology, Shizuoka Univ., 2.Shizuoka University, NEDO Technical Fellow, Central of Joint Research, 3.Institute of Multidisciplinary Research for Advanced Materials, Tohoku Univ., 4.Institute of Multidisciplinary Research for Advanced Materials, Tohoku University)

https://doi.org/10.7567/SSDM.2003.P13-4