Vertically Buckled Bridges for Three-Dimensional SOI-MEMS

M. Sasaki; D. Briand; W. Noell; N. de Rooij

doi:https://doi.org/10.7567/SSDM.2003.P14-3

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P14-3] Vertically Buckled Bridges for Three-Dimensional SOI-MEMS

M. Sasaki、D. Briand、W. Noell、N. de Rooij (1.Dept.of Machine Intelligence & Systems Eng., Tohoku University、2.Institute of microtechnology, University of Neuchatel, Switzerland)

https://doi.org/10.7567/SSDM.2003.P14-3

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