Characterization and Modeling of High Q-Factor, High Resonant Frequency Spiral Inductors with 6 μm thick Top-Metal for RF-IC Applications

Yo-Sheng Lin; Hong-Wei Chiu; Shen-Hong Wu; Shey-Shi Lu

doi:https://doi.org/10.7567/SSDM.2003.P2-11

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P2-11] Characterization and Modeling of High Q-Factor, High Resonant Frequency Spiral Inductors with 6 μm thick Top-Metal for RF-IC Applications

Yo-Sheng Lin, Hong-Wei Chiu, Shen-Hong Wu, Shey-Shi Lu (1.Department of Electrical Engineering, National Chi-Nan University, 2.Department of Electrical Engineering, National Taiwan University)

https://doi.org/10.7567/SSDM.2003.P2-11

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