The Japan Society of Applied Physics

2003 International Conference on Solid State Devices and Materials

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P3-16] Chemical structure of N Atoms in the Transition Region of the SiO(N)/Si Interface -A New Spectroscopic Method with Hydrogenation Reaction in HF Acid-

Naomi Mizuta, Satoru Watanabe (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2003.P3-16