The Japan Society of Applied Physics

[P3-16] Chemical structure of N Atoms in the Transition Region of the SiO(N)/Si Interface -A New Spectroscopic Method with Hydrogenation Reaction in HF Acid-

Naomi Mizuta, Satoru Watanabe (1.Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2003.P3-16