[P3-5] Atomic Order Flattening of Hydrogen-Terminated Si(110) substrate For Next Generation ULSI Devices

Hiroshi Akahori, Keiichi Nii, Akinobu Teramoto, Shigetoshi Sugawa, Tadahiro Ohmi (1.New Industry Creation Hatchery Center, Tohoku University, 2.Department of Management of Science and Technology Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.2003.P3-5