[P3-8] MOCVD HfAlxOy Gate Dielectrics Deposited Using Single Cocktail Liquid Source

Moon Sig Joo, Byung Jin Cho, Chia Ching Yeo, Sung Jin Whoang, Shajan Matthew, L. K. Bera, N. Balasubramanian, Dim-Lee Kwong (1.Silicon Nano Device Laboratory, Dept. of Electrical and Computer Engineering, National University of Singapore, 2.Jusung Engineering Co., Ltd., 3.Institute of Microelectronics, 4.Dept. of Electrical and Computer Engineering, The University of Texas)

https://doi.org/10.7567/SSDM.2003.P3-8