[P4-12] Electrical properties of crystalline γ-Al2O3 films using conductive-AFM and MISFETs with Aluminum gates

Takayuki Okada、Ryoki Ito、Mohammad Shahjahan、Kazuaki Sawada、Makoto Ishida (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2003.P4-12