[P4-18] Failure Mechanism of Nano-crystalline VN barrier in Cu/VN/SiO2/Si system

Takaomi Itoi, Osamu Yanada, Kazumi Satoh, M. B. Takeyama, Atsushi Noya (1.Kitami Institute of Technology, Dept. Electrical and Electronic Engineering., 2.Chiba University, Faculty of Engineering., 3.SEC Ltd., 4.Hitachi Kokusai Electric Inc.)

https://doi.org/10.7567/SSDM.2003.P4-18