Nucleation-Control in Solid-Phase-Crystallization of a-Si/SiO2 by Local Ge Insertion

Isao Tsunoda; Kei Nagatomo; Atsushi Kenjo; Taizoh Sadoh; Shinya Yamaguchi; Masanobu Miyao

doi:https://doi.org/10.7567/SSDM.2003.P4-8

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P4-8] Nucleation-Control in Solid-Phase-Crystallization of a-Si/SiO2 by Local Ge Insertion

Isao Tsunoda、Kei Nagatomo、Atsushi Kenjo、Taizoh Sadoh、Shinya Yamaguchi、Masanobu Miyao (1.Department of Electronics, Kyushu University、2.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.2003.P4-8

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