[P4-9] Atomic-scale Adsorbent Structure of Contaminant Metal on Si(100) Surface and its Effect on Thermal Oxidation

Takashi Onizawa, Tetsuya Narushima, Kazushi Miki, Kikuo Yamabe (1.Nanotechnology Research Institute (NRI), National Institute of Advanced Industrial Science and Technology (AIST), 2.Institute of Applied Physics, University of Tsukuba, 3.Nanomaterials Laboratory (NML), National Institute for Materials Science (NIMS), 4.SFI Trinity Nanoscience Laboratory, Trinity College Dublin)

https://doi.org/10.7567/SSDM.2003.P4-9