Thermal Annealing Effect in GaInNAs Thin Films Estimated by X-ray Absorption Fine Structure Spectroscopy

Kazuyuki Uno; Masako Yamada; Toshiyuki Takizawa; Ichiro Tanaka

doi:https://doi.org/10.7567/SSDM.2003.P5-6

2003 International Conference on Solid State Devices and Materials

Sep 16, 2003 - Sep 18, 2003
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P5-6] Thermal Annealing Effect in GaInNAs Thin Films Estimated by X-ray Absorption Fine Structure Spectroscopy

Kazuyuki Uno, Masako Yamada, Toshiyuki Takizawa, Ichiro Tanaka (1.Department of Systems Engineering, Wakayama University, 2.Matsushita Electric Ind., Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.P5-6

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