The Japan Society of Applied Physics

[P5-6] Thermal Annealing Effect in GaInNAs Thin Films Estimated by X-ray Absorption Fine Structure Spectroscopy

Kazuyuki Uno、Masako Yamada、Toshiyuki Takizawa、Ichiro Tanaka (1.Department of Systems Engineering, Wakayama University、2.Matsushita Electric Ind., Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.P5-6