Thermal Annealing Effect in GaInNAs Thin Films Estimated by X-ray Absorption Fine Structure Spectroscopy

Kazuyuki Uno; Masako Yamada; Toshiyuki Takizawa; Ichiro Tanaka

doi:https://doi.org/10.7567/SSDM.2003.P5-6

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P5-6] Thermal Annealing Effect in GaInNAs Thin Films Estimated by X-ray Absorption Fine Structure Spectroscopy

Kazuyuki Uno、Masako Yamada、Toshiyuki Takizawa、Ichiro Tanaka (1.Department of Systems Engineering, Wakayama University、2.Matsushita Electric Ind., Co., Ltd.)

https://doi.org/10.7567/SSDM.2003.P5-6

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