The Japan Society of Applied Physics

[P5-9] Characterization of Threading Dislocation in Si-doped GaN Films by High Spatial Resolution Cathodoluminescence Spectroscopy

Ryuichi Sugie、Masanobu Yoshikawa、Hiroshi Harima (1.Toray Research Center Inc.、2.Department of Electronics and Information Science, Kyoto Institute of Technology)

https://doi.org/10.7567/SSDM.2003.P5-9