[P6-3] Optical Properties of Acrylate-Based Negative-Type Photoresist and Fabrication of Optical Waveguides

Pavol Gustafik, Okihiro Sugihara, Naomichi Okamoto (1.Shizuoka University, Graduate School of Electronic Science and Technology, 2.Tohoku University, Institute of Multidisciplinary Research for Advanced Materials, 3.Shizuoka University, Faculty of Engineering)

https://doi.org/10.7567/SSDM.2003.P6-3