AlGaAs/InGaAs DFB laser by one time selective MOCVD growth on a grating substrate

Y. Takasuka; K. Yonei; H. Yamauchi; M. Ogura

doi:https://doi.org/10.7567/SSDM.2003.P6-9

2003 International Conference on Solid State Devices and Materials

2003年9月16日〜 2003年9月18日
Keio Plaza Inter-Continental Tokyo (Keio Plaza Hotel), Tokyo, Japan

[P6-9] AlGaAs/InGaAs DFB laser by one time selective MOCVD growth on a grating substrate

Y. Takasuka、K. Yonei、H. Yamauchi、M. Ogura (1.National Institute of Advanced Industrial Science and Technology (AIST)、2.Shibaura Institute of Technology)

https://doi.org/10.7567/SSDM.2003.P6-9

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