The Japan Society of Applied Physics

[P9-3] Complementary Operation of Schottky Source/Drain SOI MOSFET with Shallow Doped Extension

Sumie Matsumoto, Mika Nishisaka, Tanemasa Asano (1.Center for Microelectronic Systems, Kyushu Institute of Technology)

https://doi.org/10.7567/SSDM.2003.P9-3