[P9-5] Threshold Voltage Control on the Body-Tied FinFET (OMEGA MOSFET)

H. J. Jo, T. Park, J. D. Choe, S. Y. Han, J. H. Jeong, M. C. Chae, D. Park, K. Kim, E. Yoon, J.-H. Lee (1.Semiconductor R&D Center, Samsung Electronics Co., Ltd., 2.School of Materials Science and Engineering, Seoul National University, 3.School of Electrical Engineering and Computer Science, Kyungpook National University)

https://doi.org/10.7567/SSDM.2003.P9-5