Halo and LDD Engineering for Multiple VT High Performance Analog Devices in 0.13μm CMOS Technology

J. C. Guo; W.Y. Lien; C. C. Liur; C.M. Wu

doi:https://doi.org/10.7567/SSDM.2004.A-10-1

[A-10-1] Halo and LDD Engineering for Multiple VT High Performance Analog Devices in 0.13μm CMOS Technology

J. C. Guo、W.Y. Lien、C. C. Liur、C.M. Wu (1.Department of Electronics Engineering, National Chiao Tung University、2.Research Development Center, Taiwan Semiconductor Manufacturing Corp.)

https://doi.org/10.7567/SSDM.2004.A-10-1

2004 International Conference on Solid State Devices and Materials

[A-10-1] Halo and LDD Engineering for Multiple VT High Performance Analog Devices in 0.13μm CMOS Technology