[A-5-1] Successful CMOS Operation of Dopant-Segregation Schottky Barrier Transistors (DS-SBTs)

A. Kinoshita, Y. Tsuchiya, A. Yagishita, K. Uchida, J. Koga (1.Advanced LSI Technology Laboratory, Corporate R&D Center, Toshiba Corporation, 2.Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation)

https://doi.org/10.7567/SSDM.2004.A-5-1