[A-5-3] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

Md. Shofiqul Islam、Hiroshi Ishino、Takeshi Kawano、Hidekuni Takao、Kazuaki Sawada、Makoto Ishida (1.Department of Electrical and Electronic Engineering Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2004.A-5-3