Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

Md. Shofiqul Islam; Hiroshi Ishino; Takeshi Kawano; Hidekuni Takao; Kazuaki Sawada; Makoto Ishida

doi:https://doi.org/10.7567/SSDM.2004.A-5-3

[A-5-3] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method

Md. Shofiqul Islam, Hiroshi Ishino, Takeshi Kawano, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida (1.Department of Electrical and Electronic Engineering Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.2004.A-5-3

2004 International Conference on Solid State Devices and Materials

[A-5-3] Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method