[A-7-2] Thermal Stability of Metal Gate Work Functions

H.Y. Yu、Chi Ren、J.F. Kang、Yee-Chia Yeo、Daniel S.H. Chan、M.F. Li、Dim-Lee Kwong (1.Silicon Nano Device Lab, Dept. of Electrical & Computer Eng., National University of Singapore、2.Institute of Microelectronics、3.Dept. of ECE, The University of Texas)

https://doi.org/10.7567/SSDM.2004.A-7-2