[A-7-2] Thermal Stability of Metal Gate Work Functions

H.Y. Yu, Chi Ren, J.F. Kang, Yee-Chia Yeo, Daniel S.H. Chan, M.F. Li, Dim-Lee Kwong (1.Silicon Nano Device Lab, Dept. of Electrical & Computer Eng., National University of Singapore, 2.Institute of Microelectronics, 3.Dept. of ECE, The University of Texas)

https://doi.org/10.7567/SSDM.2004.A-7-2