Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano; Mizuhisa Nihei; Shintaro Sato; Akio Kawabata; Daiyu Kondo; Mari Ohfuti; Naoki Yokoyama

doi:https://doi.org/10.7567/SSDM.2004.B-2-1

2004 International Conference on Solid State Devices and Materials

Sep 14, 2004 - Sep 17, 2004
Tower Hall Funabori, Tokyo, Japan

[B-2-1] Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano, Mizuhisa Nihei, Shintaro Sato, Akio Kawabata, Daiyu Kondo, Mari Ohfuti, Naoki Yokoyama (1.Fujitsu Limited, 2.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2004.B-2-1

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