Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano; Mizuhisa Nihei; Shintaro Sato; Akio Kawabata; Daiyu Kondo; Mari Ohfuti; Naoki Yokoyama

doi:https://doi.org/10.7567/SSDM.2004.B-2-1

2004 International Conference on Solid State Devices and Materials

2004年9月14日〜 2004年9月17日
Tower Hall Funabori, Tokyo, Japan

[B-2-1] Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano、Mizuhisa Nihei、Shintaro Sato、Akio Kawabata、Daiyu Kondo、Mari Ohfuti、Naoki Yokoyama (1.Fujitsu Limited、2.Nanotechnology Research Center, Fujitsu Laboratories Ltd.)

https://doi.org/10.7567/SSDM.2004.B-2-1

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