[B-3-4] Reverse CoSi2 Thermal Stability and Digitized Sheet Resistance Increase in Sub-90nm Poly-Si Lines

Cheng-Yao Lo, Yuan-Ching Peng, Yen-Ming Chen, Shyue-Shyh Lin, Wei-Ming Chen (1.Advanced Logic-1, Logic Technology Division, Taiwan Semiconductor Manufacturing Company, Ltd.)

https://doi.org/10.7567/SSDM.2004.B-3-4