[B-3-4] Reverse CoSi2 Thermal Stability and Digitized Sheet Resistance Increase in Sub-90nm Poly-Si Lines

Cheng-Yao Lo、Yuan-Ching Peng、Yen-Ming Chen、Shyue-Shyh Lin、Wei-Ming Chen (1.Advanced Logic-1, Logic Technology Division, Taiwan Semiconductor Manufacturing Company, Ltd.)

https://doi.org/10.7567/SSDM.2004.B-3-4