[B-6-2] Effect of Kr Gas Dilution on O Atom Density in Surface Wave Excited Kr/O2 Plasma for Low -Temperature and Damage-free Plasma Oxidation Processes

Y. Kubota, K. Yamakawa, M. Hori (1.Department of Electrical Engineering and Computer Science, Nagoya University)

https://doi.org/10.7567/SSDM.2004.B-6-2