[C-3-2] Trapping/de-trapping gate bias dependence of Hf-silicate dielectrics with poly and TiN gate electrode

Jang Hoan Sim、Rino Choi、Byoung Hun Lee、Chadwin Young、Peter Zeitzoff、Gennadi Bersuker (1.International SEMATECH、2.IBM assignee)

https://doi.org/10.7567/SSDM.2004.C-3-2