[C-4-3] Fabrication and characteristics of Germanium-on-Insulator

Yu-Lin Chao, Roland Scholz, Manfred Reiche, Ulrich M. Gosele, Jason C. S. Woo (1.Univ. of California, Los Angeles, Dept. of Electrical Engineering, School of Eng., 2.Max-Plank Institute of Microstructure Physics)

https://doi.org/10.7567/SSDM.2004.C-4-3