[C-7-3] Study of Mobility in Strained Silicon and Germanium Ultra Thin Body MOSFETs

Tony Low, Chen Shen, M. F. Li, Yee-Chia Yeo, Y. T. Hou, Chunxiang Zhu, Albert Chin, L. Chan, D. L. Kwong (1.Silicon Nano Device Lab (SNDL), ECE Department, National University of Singapore, 2.Institute of Microelectronis, 3.Technology Development, Chartered Semiconductor Manufacturing, Singapore, 4.Dept Electronics Eng., National Chiao Tung Univ., Taiwan, 5.Dept. Electrical and Computer Engineering, University of Texas)

https://doi.org/10.7567/SSDM.2004.C-7-3