[C-9-2] Stable Observation of the Evolution of Leakage Spots in HfO2/SiO2 stacked structures by UHV-C-AFM

Kentaro Kyuno, Koji Kita, Akira Toriumi (1.Department of Materials Science, School of Engineering, The University of Tokyo)

https://doi.org/10.7567/SSDM.2004.C-9-2