[C-9-3] Far Infrared Study of Structural Distortion and Transformation of HfO2 by Introducing a Slight Amount of Si

Kazuyuki Tomida、Koji Kita、Kentaro Kyuno、Akira Toriumi (1.Department of Materials Science, School of Engineering, The Univ. of Tokyo)

https://doi.org/10.7567/SSDM.2004.C-9-3