[D-1-5] Impact of the Grain Size and Orientation of SrBi2(Ta,Nb)2O9 Films on the Polarization for Nano-Scale FeRAMs

K. Kaibara、K. Tanaka、K. Uchiyama、Y. Shimada (1.Semiconductor Company, Matsushita Electric Industrial Co., Ltd.)

https://doi.org/10.7567/SSDM.2004.D-1-5