Preparation and Characterization of ZnO and (Zn,Mg)O films doped with Al

Haruki Ryoken; Isao Sakaguchi; Takeshi Ohgaki; Yutaka Adachi; Naoki Ohashi; Tadashi Takenaka; Hajime Haneda

doi:https://doi.org/10.7567/SSDM.2004.D-10-4

[D-10-4] Preparation and Characterization of ZnO and (Zn,Mg)O films doped with Al

Haruki Ryoken、Isao Sakaguchi、Takeshi Ohgaki、Yutaka Adachi、Naoki Ohashi、Tadashi Takenaka、Hajime Haneda (1.Advanced Materials Laboratory, National Institute for Materials Science、2.Department of Applied Science for Electronics & Materials, Kyushu University、3.Department of Science and Technology, Tokyo University of Science)

https://doi.org/10.7567/SSDM.2004.D-10-4

2004 International Conference on Solid State Devices and Materials

[D-10-4] Preparation and Characterization of ZnO and (Zn,Mg)O films doped with Al