[D-8-1] Low-dislocation AlGaN thin films grown using Al1-xSixN nano-disks (x= 0.07-0.17)

Tetsuya Akasaka、Yoshitaka Taniyasu、Makoto Kasu、Toshiki Makimoto (1.NTT Basic Research Laboratories, NTT Corporation)

https://doi.org/10.7567/SSDM.2004.D-8-1