Growth of AlGaN/GaN Quantum Wire Structures by RF-Radical Assisted Selective MBE on Pre-Patterned Substrates

Taketomo Sato; Takeshi Oikawa; Tamotsu Hashizume; Hideki Hasegawa

doi:https://doi.org/10.7567/SSDM.2004.D-8-3

[D-8-3] Growth of AlGaN/GaN Quantum Wire Structures by RF-Radical Assisted Selective MBE on Pre-Patterned Substrates

Taketomo Sato、Takeshi Oikawa、Tamotsu Hashizume、Hideki Hasegawa (1.Research Center for Integrated Quantum Electronics (RCIQE) and Graduate School of Information Science and Technology, Hokkaido University)

https://doi.org/10.7567/SSDM.2004.D-8-3

2004 International Conference on Solid State Devices and Materials

[D-8-3] Growth of AlGaN/GaN Quantum Wire Structures by RF-Radical Assisted Selective MBE on Pre-Patterned Substrates