The Japan Society of Applied Physics

[D-8-3] Growth of AlGaN/GaN Quantum Wire Structures by RF-Radical Assisted Selective MBE on Pre-Patterned Substrates

Taketomo Sato, Takeshi Oikawa, Tamotsu Hashizume, Hideki Hasegawa (1.Research Center for Integrated Quantum Electronics (RCIQE) and Graduate School of Information Science and Technology, Hokkaido University)

https://doi.org/10.7567/SSDM.2004.D-8-3