The Japan Society of Applied Physics

[D-8-5] Improvement of GaN Crystal Quality in RF-MBE Using Thin Low-Temperature-Grown GaN Buffer Layers

Mitsuaki Shimizu、Yoshitaka Hirata、Guanxi Piao、Hajime Okumura (1.Power Electronics Research Center, National Institute of Advanced Industrial Science and Technology、2.Department of Science and Technology, Graduated School of Meiji University)

https://doi.org/10.7567/SSDM.2004.D-8-5